Micro and Nano Engineering
Journal title: Micro and Nano Engineering
EISSN: 2590-0072
Keywords: nanotechnology, microelectronics, nanolithography, nanometrology, nanofabrication, microdevices
Languages: English
Publisher: Elsevier
Country: Netherlands
APC: Yes
Subjects: Technology: Electrical engineering. Electronics. Nuclear engineering: Electronics | Technology: Technology (General)
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