Journal of Vacuum Science and Technology B
Journal title: Journal of Vacuum Science and Technology B
ISSN: 21662746
E-ISSN: 21662754
Publisher: AVS Science and Technology Society
Country: United States
Subject: Process Chemistry and Technology
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Materials Chemistry
Surfaces, Coatings and Films
Condensed Matter Physics
Instrumentation
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