Journal Of Microelectromechanical Systems
Journal title: Journal Of Microelectromechanical Systems
ISSN: 1057-7157
EISSN: 1941-0158
Publisher name: Ieee-Inst Electrical Electronics Engineers Inc
Publisher address: 445 Hoes Lane, Piscataway, Usa, Nj, 08855-4141
Languages: English
Subject: Engineering, Electrical & Electronic | Nanoscience & Nanotechnology | Instruments & Instrumentation | Physics, Applied
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