Microelectronic Engineering

Journal title: Microelectronic Engineering
ISSN: 0167-9317
EISSN: 1873-5568
Publisher name: Elsevier
Publisher address: Radarweg 29, Amsterdam, Netherlands, 1043 Nx
Languages: English
Subject: Engineering, Electrical & Electronic | Nanoscience & Nanotechnology | Optics | Physics, Applied